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刻蚀设备
ESC静电卡盘设计开发及overhaul
液体流量控制 injection valve，LFC 等
设备备件支持+后道功率封装耗材
LAM9400 LRC 8

LAM9400 LRC 8" Flat
AMAT MxP+ P5000 CENTURA MXP+ R2 POLY ESC,145MM SEMI FLATPoly 6

AMAT MxP+ P5000 CENTURA MXP+ R2 POLY ESC,145MM SEMI FLATPoly 6" flat
AMAT MxP-5200 DPS 8

AMAT MxP-5200 DPS 8" Flat
AMAT MxP-5200 P5000/MxP-5200/Poly 8

AMAT MxP-5200 P5000/MxP-5200/Poly 8" Flat
SIC深沟槽刻蚀 6

SIC深沟槽刻蚀 6" Flat
TEL7400 6

TEL7400 6" Notch
Tel 12

Tel 12" Notch
LAM 2300 12

LAM 2300 12" Notch
LAM 2300 12

LAM 2300 12" Notch
LAM9400 8

LAM9400 8" Notch
LAM4520 6

LAM4520 6"ESC FLAT
LAM44/46/47 6

LAM44/46/47 6"ESC FLAT