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ESC静电卡盘设计开发及overhaul
液体流量控制 injection valve，LFC 等
设备备件支持+后道功率封装耗材
光刻机
MKS真空压力计
HORIBA系列晶圆背面冷却系统压力控制器
LAM9400 8

LAM9400 8" ESC,notch
AMAT P5000/CENTURA5200 MXP+ R2 POLY ESC,195MM,8

AMAT P5000/CENTURA5200 MXP+ R2 POLY ESC,195MM,8"，notch
AMAT P5000/CENTURA5200 MXP+ R2 POLY ESC,195MM,SEMI FLAT,8

AMAT P5000/CENTURA5200 MXP+ R2 POLY ESC,195MM,SEMI FLAT,8"，flat
AMAT P5000/CENTURA MXP+ R2 POLY ESC,145MM,SEMI FLAT6

AMAT P5000/CENTURA MXP+ R2 POLY ESC,145MM,SEMI FLAT6"，flat
AMAT MxP+ P5000 CENTURA MXP+ R2 POLY ESC,145MM SEMI FLATPoly 6

AMAT MxP+ P5000 CENTURA MXP+ R2 POLY ESC,145MM SEMI FLATPoly 6" flat
AMAT MxP+ P5000 CENTURA MXP+ oxide etch 6

AMAT MxP+ P5000 CENTURA MXP+ oxide etch 6" flat
AMAT WXP P5000 CENTURA WXP WEB W-etch 8

AMAT WXP P5000 CENTURA WXP WEB W-etch 8" notch
AMAT WXP P5000 CENTURA WXP WEB W-etch 6

AMAT WXP P5000 CENTURA WXP WEB W-etch 6" flat
AMAT MxP-5200/DPS 6

AMAT MxP-5200/DPS 6" Semi，flat
AMAT MxP 5200 Mxp P5000/Poly 6

AMAT MxP 5200 Mxp P5000/Poly 6" Flat
AMAT MxP+ P5000/CENTURA 5200/MxP-5200 MXP+ Oxide 8

AMAT MxP+ P5000/CENTURA 5200/MxP-5200 MXP+ Oxide 8" notch
AMAT MxP+ P5000/CENTURA 5200/MxP-5200/MXP+Oxide 8

AMAT MxP+ P5000/CENTURA 5200/MxP-5200/MXP+Oxide 8" Flat