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CVD设备
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刻蚀设备
ESC静电卡盘设计开发及overhaul
液体流量控制 injection valve，LFC 等
设备备件支持+后道功率封装耗材
MRC ECLIPSE Mark II/Mark star SPA（RMA）-10″/-12″ RMX-10″/-12″

MRC ECLIPSE Mark II/Mark star SPA（RMA）-10″/-12″ RMX-10″/-12″
APPLIED MATERIALS AMAT P5000 CVD

APPLIED MATERIALS AMAT P5000 CVD
NOVELLUS C1-150/C1-200 Heater-PECVD

NOVELLUS C1-150/C1-200 Heater-PECVD
APPLIED MATERIALS P5000 6“ 8”

APPLIED MATERIALS P5000 6“ 8”
Lam TCP9600 6“ 8” clamp or ESC

Lam TCP9600 6“ 8” clamp or ESC
Lam TCP9400 6“ 8” clamp or ESC

Lam TCP9400 6“ 8” clamp or ESC
Lam Rainbow 4520 4“ 5” 6“ 8” clamp or ESC

Lam Rainbow 4520 4“ 5” 6“ 8” clamp or ESC
Lam Rainbow 4420 4“ 5” 6“ 8” clamp or ESC

Lam Rainbow 4420 4“ 5” 6“ 8” clamp or ESC
MC3.GP IMP 12

MC3.GP IMP 12"
MEHD2 V1500 IMP 12

MEHD2 V1500 IMP 12" PI
MEHD2 V1500 IMP 12

MEHD2 V1500 IMP 12" 陶瓷
VIISta 810XER IMP 12

VIISta 810XER IMP 12" PI